The current state of the art of embedded motion sensing is based around micro-electromechanical systems (MEMS) devices. These miracles of microfabrication use tiny silicon structures, configured to ...

This image compares data from two Iceye Synthetic Aperture Radar images. Changes in the vertical height of the surface appear black. Areas without changes are depicted in white. Credit: Iceye SAN ...

One of the biggest challenges for nanoscale fabrication is how to measure devices on such a minute scale. As the semiconductor industry demands ever smaller devices, the need for reliable, robust ...

Measuring high aspect ratio and composite micro-trenches without damage is critical for advanced microfabrication, yet conventional coherence scanning interferometry often suffers from a low signal-to ...

Electronic and computer processors with a higher speed need smaller features for integrated circuits (IC), which also need smoother and smaller substrate surfaces. Chemical mechanical polishing (CMP) ...

Accurately controlling film thickness and uniformity is extremely important for both throughput and performance in the automotive, aerospace, semiconductor, medical, and research industries. White ...